SLIM™ is an innovative design for under-the-column BSE detection.
SLIM™ puts El-Mul’s ScintiFast™ together with a segmented, shaped light guide and Silicon Photomultipliers (SiPM) to create a fast, sensitive, segmented and compact BSE detector for e-beam tools.
The patented SLIM™ technology can be implemented in several ways and the performance parameters vary according to the specific design.
Its dynamic range can extend up to three orders of magnitude and its response time can be as short as 10nsec.
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