El-Mul was the first to present a commercial detection module for FIB/SEM tools that combines secondary ion (SI) and secondary electron (SE) modes of detection in a single compact device, without compromising either mode.
This patented technology leap-frogged FIB/SEM tool performance and opened a range of possibilities for new ion beam applications.
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Elion ion mode
Ion mode - stage 1
Secondary ions from the sample are accelarated towards a convertor and create a proportional signal of secondary electrons.
Ion mode - stage 2
Secondary electrons, generated from the convertor are accelerated towards the scintillator to create a photon signal.